Select the number of rows and columns.Ī table will be displayed with “0” correction values in all locations: Figure 2. The GCFC application will interpolate the table size to 65 x 65 before saving the results to a GCAL file. The table can have a different number of rows and columns.

Select the desired number of rows and columns. The “Calibration File Type” window will be displayed (Figure 1). To create a new file, select “New” from the “File” menu. This is done so that there are correction values that pass through the origin (X=0, Y=0) of the scanner. Tables should be created with an odd number of rows and columns.

Manual File Creation Process Step 1: Create a New File This application note will outline the procedures required to create new calibration tables and how to merge calibration tables for Nmark SSaM. The measurement resolutions of the tables to be merged do not have to match as GCFC will interpolate the correction values of the lower resolution table to match those of the higher resolution table. When the density of the marks in the tables to be combined is not equal, an algorithm must be applied to interpolate lower resolution data with higher resolution data.Īerotech’s Galvo Calibration File Converter (GCFC) application can be used to merge measurement data during the calibration process. When the tables are of the same resolution, the values can be added directly to each other.

Each iteration of the mark and measure sequence must combine the new measurement values with the current calibration table to create a new calibration table. Calibrating the field of view for scanners is typically an iterative process where a series of marks are placed on a substrate and the location of these marks is used to create a calibration file, and the process is repeated to reach final system accuracy.

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